- ÃÑ 19°³ÀÇ »óǰÀÌ °Ë»öµÇ¾ú½À´Ï´Ù.
-
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Compact Alignment Stage Ư¡
1. X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. Compact Size
3. 3D Encoder option °íÁ¤¹Ðµµ ±¸Çö
4. ÀÚü Á¤¹Ðµµ º¸»ó Á¦¾î ¾Ë°í¸®ÁòÀ» Àû¿ëÇÑ S/W ¹× µå¶óÀ̹ö ÄÁÆ®·Ñ·¯ »ç¿ëÀ¸·Î ÅëÇսýºÅÛ ¼Ö·ç¼Ç Á¦°ø
-
-
Alignment Stage Ư¡
1. µ¿ÀÏÆò¸é»ó¿¡¼ X,Y,¥ÈÃà Á¶ÇÕÀÇ Alignment ±¸µ¿
2. ³·Àº ³ôÀÌ·Î °ø°£Àý¾à ¼³°è°¡´É
3. °íÁ¤¹Ð À§Ä¡°áÁ¤ °¡´É